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Proceedings Paper

Vibration diagnosis and remediation design for an x-ray optics stitching interferometer system
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Paper Abstract

The Advanced Photon Source (APS) x-ray optics Metrology Laboratory currently operates a small-aperture Wyko laser interferometer in a stitching configuration. While the stitching configuration allows for easier surface characterization of long x-ray substrates and mirrors, the addition of mechanical components for optic element translation can compromise the ultimate measurement performance of the interferometer. A program of experimental vibration measurements, quantifying the laboratory vibration environment and identifying interferometer support-system behavior, has been conducted. Insight gained from the ambient vibration assessment and modal analysis has guided the development of a remediation technique. Discussion of the problem diagnosis and possible solutions are presented in this paper.

Paper Details

Date Published: 18 October 2004
PDF: 9 pages
Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); doi: 10.1117/12.560646
Show Author Affiliations
Curt A. Preissner, Argonne National Lab. (United States)
Lahsen Assoufid, Argonne National Lab. (United States)
Deming Shu, Argonne National Lab. (United States)


Published in SPIE Proceedings Vol. 5533:
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
Ali M. Khounsary; Udo Dinger; Kazuya Ota, Editor(s)

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