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Proceedings Paper

High-temperature film thickness sensors for CVD process control
Author(s): Scott F. Grimshaw
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Paper Abstract

A new film thickness sensor material, single crystal gallium orthophosphate (GaPO4), has been investigated for use as a high temperature piezoelectric microbalance suitable for monitoring chemical vapor deposition (CVD) thin film processes. Our initial work has shown that gallium phosphate can operate at temperatures up to 930°C, and a reusable sensor housing can be constructed to hold the crystal for repeated runs. A significant shortcoming is that commercial film thickness monitors are not capable of accurately controlling GaPO4 above 600°C due to the limitations of the oscillator electronics used in such monitors.

Paper Details

Date Published: 29 September 2004
PDF: 7 pages
Proc. SPIE 5527, Advances in Thin Film Coatings for Optical Applications, (29 September 2004); doi: 10.1117/12.560442
Show Author Affiliations
Scott F. Grimshaw, Tangidyne Corp. (United States)

Published in SPIE Proceedings Vol. 5527:
Advances in Thin Film Coatings for Optical Applications
Jennifer D. T. Kruschwitz; James B. Oliver, Editor(s)

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