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Proceedings Paper

Fabrication of microlens using CO2 laser and characterization of formation process
Author(s): Hiroshi Murotani; Moriaki Wakaki; Shuichi Kawabata; Kenji Nakamoto
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Paper Abstract

Microlenses were formed directly on a surface of a glass plate by using CO2 laser. This method has the merit of complete dry processing and presents simple way of microlens fabrication. We discuss about the formation process and mechanism through the characterization of irradiation parameters and the glass composition. When the surface of a glass plate is heated locally to a working point of the glass material by a focused CO2 laser beam, a microlens is formed owing to surface tension. It was found possible to fabricate microlens easily placed at different focal position by controlling a laser power and an irradiation time. The volume of the fabricated microlens was found to be dependent on laser irradiation energy (laser power x irradiation time) and irradiated position. When a Corning 7059 glass plate was used, a convex microlens was obtained at the energy density smaller than ca.100 (μJ/μm2 ). The dynamical stress change of the microlens was measured in-situ by using the ellipsometry analysis to make clear the formation process of microlens. The T-FDP (four detectors polarimeter of transmission type) was used for this analysis.

Paper Details

Date Published: 29 September 2004
PDF: 8 pages
Proc. SPIE 5525, Laser Beam Shaping V, (29 September 2004); doi: 10.1117/12.560369
Show Author Affiliations
Hiroshi Murotani, Tokai Univ. (Japan)
Moriaki Wakaki, Tokai Univ. (Japan)
Shuichi Kawabata, Tokyo Institute of Polytechnics (Japan)
Kenji Nakamoto, Tokai Univ. (Japan)


Published in SPIE Proceedings Vol. 5525:
Laser Beam Shaping V
Fred M. Dickey; David L. Shealy, Editor(s)

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