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Proceedings Paper

An improved illumination system for spatial coherence control
Author(s): Zhiqiang Liu; Takeshi Gemma; Joseph Rosen; Mitsuo Takeda
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Paper Abstract

A longitude coherence control system needs a source that is temporally coherent and yet spatially incoherent. For this reason, a zone plate-like pattern is imaged onto a rotating ground glass. Generally the ground glass exhibits a strong directivity. It is far from an ideal uniform diffuser that is implicitly assumed in the theory. To solve this problem, we propose a new illumination system. In our system, the beam illuminating the zone plate-like pattern is focused on the test surface. We measured the longitudinal coherence functions in our optical system. The result shows that the longitude coherent function is better controlled in our interferometer.

Paper Details

Date Published: 2 August 2004
PDF: 8 pages
Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); doi: 10.1117/12.560350
Show Author Affiliations
Zhiqiang Liu, Nikon Corp. (Japan)
Takeshi Gemma, Nikon Corp. (Japan)
Joseph Rosen, Ben-Gurion Univ. of the Negev (Israel)
Mitsuo Takeda, Univ. of Electro-Communications (Japan)

Published in SPIE Proceedings Vol. 5531:
Interferometry XII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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