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Proceedings Paper

Synchrotron x-ray study of multilayers in Laue geometry
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Paper Abstract

Zone plates with depth to zone-width ratios as large as 100 are needed for focusing of hard x-rays. Such high aspect ratios are challenging to produce by lithography. We are investigating the fabrication of high-aspect-ratio linear zone plates by multilayer deposition followed by sectioning. As an initial step in this work, we present a synchrotron x-ray study of constant-period multilayers diffracting in Laue (transmission) geometry. Data are presented from two samples: a 200 period W/Si multilayer with d-spacing of 29 nm, and a 2020 period Mo/Si multilayer with d-spacing of 7 nm. By cutting and polishing we have successfully produced thin cross sections with section depths ranging from 2 to 12 μm. Transverse scattering profiles (rocking curves) across the Bragg reflection exhibit well-defined interference fringes originating from the depth of the sample, in agreement with dynamical diffraction theory for a multilayer in Laue geometry.

Paper Details

Date Published: 3 November 2004
PDF: 6 pages
Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004); doi: 10.1117/12.560173
Show Author Affiliations
Hyon Chol Kang, Argonne National Lab. (United States)
Gregory B. Stephenson, Argonne National Lab. (United States)
Chian Liu, Argonne National Lab. (United States)
Ray Conley, Argonne National Lab. (United States)
Albert T. Macrander, Argonne National Lab. (United States)
Jorg Maser, Argonne National Lab. (United States)
Sasa Bajt, Lawrence Livermore National Lab. (United States)
Henry N. Chapman, Lawrence Livermore National Lab. (United States)

Published in SPIE Proceedings Vol. 5537:
X-Ray Sources and Optics
Carolyn A. MacDonald; Albert T. Macrander; Tetsuya Ishikawa; Christian Morawe; James L. Wood, Editor(s)

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