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Proceedings Paper

Some numerical models of dispersion curve fitting
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Paper Abstract

The parameters of two dispersion models for Si3N4 dots of multilayer 2D grating are established by the fitting procedures. The Gauss-Newton and Levenberg-Marquardt fitting algorithms are compared. Spectral ellipsometric measurements as the resource of experimental data are reported. In the objective function, various weighting coefficients corresponding to ellipsometric angles are tested.

Paper Details

Date Published: 7 April 2004
PDF: 5 pages
Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); doi: 10.1117/12.560128
Show Author Affiliations
Jaroslav Vlcek, Technical Univ. of Ostrava (Czech Republic)
Jaromir Pistora, Technical Univ. of Ostrava (Czech Republic)


Published in SPIE Proceedings Vol. 5445:
Microwave and Optical Technology 2003
Jaromir Pistora; Kamil Postava; Miroslav Hrabovsky; Banmali S. Rawat, Editor(s)

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