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Proceedings Paper

Reconstruction of grating parameters from ellipsometric data
Author(s): Martin Foldyna; Dalibor Ciprian; Jaromir Pistora; Kamil Postava; R. Antos
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Paper Abstract

This paper presents specific experimental ellipsometric data fit of dielectric 2D grating, which can be characterized as very shallow structure. The grating pattern is of squared shape, with sharp edges and depth to period ratio about 1/1000. The rigorous coupled wave analysis (RCWA) was used for characterization of grating response on optical wavelengths. Boundary conditions were formulated using transfer matrix method. Material parameters of the patterned dots are supposed to be known from additional experiments. The task of the fit si to find unknown thickness of all parts of dots.

Paper Details

Date Published: 7 April 2004
PDF: 4 pages
Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); doi: 10.1117/12.560118
Show Author Affiliations
Martin Foldyna, Technical Univ. of Ostrava (Czech Republic)
Dalibor Ciprian, Technical Univ. of Ostrava (Czech Republic)
Jaromir Pistora, Technical Univ. of Ostrava (Czech Republic)
Kamil Postava, Technical Univ. of Ostrava (Czech Republic)
R. Antos, Shizuoka Univ. (Japan)

Published in SPIE Proceedings Vol. 5445:
Microwave and Optical Technology 2003
Jaromir Pistora; Kamil Postava; Miroslav Hrabovsky; Banmali S. Rawat, Editor(s)

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