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Proceedings Paper

Multilayer Laue lenses as high-resolution x-ray optics
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Paper Abstract

Using Fresnel zone plates, a spatial resolution between 20 nm for soft x-rays and 70 nm for hard x-rays has been achieved. Improvement of the spatial resolution without loss of efficiency is difficult and incremental due to the fabrication challenges posed by the combination of small outermost zone width and high aspect ratios. We describe a novel approach for high-resolution x-ray focusing, a multilayer Laue lens (MLL). The MLL concept is a system of two crossed linear zone plates, manufactured by deposition techniques. The approach involves deposition of a multilayer with a graded period, sectioning it to the appropriate thickness, assembling the sections at the optimum angle, and using it in Laue geometry for focusing. The approach is particularly well suited for high-resolution focusing optics for use at high photon energy. We present a theory of the MLL using dynamic diffraction theory and Fourier optics.

Paper Details

Date Published: 4 November 2004
PDF: 10 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.560046
Show Author Affiliations
Joerg Maser, Argonne National Lab. (United States)
Gregory B. Stephenson, Argonne National Lab. (United States)
Stefan Vogt, Argonne National Lab. (United States)
Wenbing Yun, Argonne National Lab. (United States)
Albert Macrander, Argonne National Lab. (United States)
Hyon Chol Kang, Argonne National Lab. (United States)
Chian Liu, Argonne National Lab. (United States)
Ray Conley, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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