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Proceedings Paper

Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control
Author(s): Hao Zhu; Paul Bierden; Steven Cornelissen; Thomas Bifano; Jin-Hong Kim
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Paper Abstract

This paper describes design and fabrication of a microelectromechanical metal spatial light modulator (SLM) integrated with complementary metal-oxide semiconductor (CMOS) electronics, for high-dynamic-range wavefront control. The metal SLM consists of a large array of piston-motion MEMS mirror segments (pixels) which can deflect up to 0.78 µm each. Both 32x32 and 150x150 arrays of the actuators (1024 and 22500 elements respectively) were fabricated onto the CMOS driver electronics and individual pixels were addressed. A new process has been developed to reduce the topography during the metal MEMS processing to fabricate mirror pixels with improved optical quality.

Paper Details

Date Published: 12 October 2004
PDF: 7 pages
Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); doi: 10.1117/12.559929
Show Author Affiliations
Hao Zhu, Boston Micromachines Corp. (United States)
Paul Bierden, Boston Micromachines Corp. (United States)
Steven Cornelissen, Boston Micromachines Corp. (United States)
Thomas Bifano, Boston Univ. (United States)
Jin-Hong Kim, Boston Univ. (United States)

Published in SPIE Proceedings Vol. 5553:
Advanced Wavefront Control: Methods, Devices, and Applications II
John D. Gonglewski; Mark T. Gruneisen; Michael K. Giles, Editor(s)

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