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Proceedings Paper

Surface profiling using a reference-scanning Mirau interference microscope
Author(s): Xavier Colonna de Lega; David Grigg; Peter de Groot
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Paper Abstract

We compare two modes of measurement of shallow objects using a scanning interference microscope. In one mode the object is moved with respect to the Mirau interference objective while a camera records the interference pattern. In another mode the beam splitter is moved during the scan while the object remains in focus. We use both narrowband and broadband extended LED sources for the experiments with a modified 0.8-NA Mirau objective. A detailed analysis of the low-coherence interference signals in the spatial and spectral domains reveals small differences between the two scan mode. However, the comparison of surface profiles of objects having surface departures smaller than the depth of focus shows no appreciable differences. We conclude that the small amount of defocus that affects interference signals recorded during an object scan does not influence the quality of the measurement when using typical broadband extended sources.

Paper Details

Date Published: 2 August 2004
PDF: 11 pages
Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); doi: 10.1117/12.559893
Show Author Affiliations
Xavier Colonna de Lega, Zygo Corp. (United States)
David Grigg, Zygo Corp. (United States)
Peter de Groot, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 5532:
Interferometry XII: Applications
Wolfgang Osten; Erik Novak, Editor(s)

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