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Proceedings Paper

The evolution of hard x-ray tomography from the micrometer to the nanometer length scale
Author(s): Christoph Rau; K. M. Peterson; P. R. Jemian; T. Terry; Michael T. Harris; Stefan Vogt; C.-P. Richter; U. Neuhausler; G. Schneider; Ian K. Robinson
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Paper Abstract

For several years efforts have been made to improve the resolution for imaging and tomography with hard X-rays. Recently we demonstrated sub-100 nm resolution at 13 keV with a microscope including a Kirkpatrick-Baez multilayer-mirror (KB) as a condenser followed by a micro-Fresnel Zone Plate (FZP) as an objective lens. We built since a new tomography station at UNICAT at the Advanced Photon Source integrating the KB-FZP microscope for 100 nm tomography.

Paper Details

Date Published: 26 October 2004
PDF: 6 pages
Proc. SPIE 5535, Developments in X-Ray Tomography IV, (26 October 2004); doi: 10.1117/12.559887
Show Author Affiliations
Christoph Rau, Argonne National Lab (United States)
Univ. of Illinois/Urbana-Champaign (United States)
Purdue Univ. (United States)
K. M. Peterson, Univ. of Illinois/Urbana-Champaign (United States)
P. R. Jemian, Univ. of Illinois/Urbana-Champaign (United States)
T. Terry, Purdue Univ. (United States)
Michael T. Harris, Purdue Univ. (United States)
Stefan Vogt, Argonne National Lab. (United States)
C.-P. Richter, Northwestern Univ. (United States)
U. Neuhausler, Univ. Bielefeld (Germany)
G. Schneider, BESSY GmbH (Germany)
Ian K. Robinson, Univ. of Illinois/Urbana-Champaign (United States)


Published in SPIE Proceedings Vol. 5535:
Developments in X-Ray Tomography IV
Ulrich Bonse, Editor(s)

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