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Proceedings Paper

New principles of diagnostics of surface parameters of solids by methods of x-ray total external reflection
Author(s): S. V. Balovsyak; Igor M. Fodchuk
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Paper Abstract

The series of GaAs and SiO2 samples with the specially prepared one- and two-dimensional surface reliefs have been investigated by the methods of integral and differential curve of X-ray total external reflection. The direct and inverse problems were solved, taking into consideration data obtained by the method of atomic-force microscopy. The theoretical curves of total external reflection are calculated and the parameters describing a surface relief of the samples are restored. The fractal approach for describing of the shape of differential curves and surface profiles was used.

Paper Details

Date Published: 4 June 2004
PDF: 8 pages
Proc. SPIE 5477, Sixth International Conference on Correlation Optics, (4 June 2004); doi: 10.1117/12.559861
Show Author Affiliations
S. V. Balovsyak, Chernivtsi National Univ. (Ukraine)
Igor M. Fodchuk, Chernivtsi National Univ. (Ukraine)


Published in SPIE Proceedings Vol. 5477:
Sixth International Conference on Correlation Optics
Oleg V. Angelsky, Editor(s)

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