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Proceedings Paper

Equivalence between the software-determined and the hardware-determined effective numerical aperture in the interferometrical measuring of microlens
Author(s): Masahiko Kato; Takaaki Miyashita; Kenjiro Hamanaka; Satoshi Ishihara; Eiichi Sato; Tadashi Morokuma
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Paper Abstract

We describe here characteristic properties relating to the interferometrical measuring of microlens with an effective numerical aperture determined by the software or the hardware. Starting from the wave equation, both of the amplitude and the phase of propagating optical beams can be calculated using Hankel transformation anywhere through the interferometer. First introducing the effective aperture determined by the hardware including the method of projecting the effective aperture on the pupil of the microlens, the effect of truncation or diffraction with the effective aperture on the beam propagation is shown. Next using Mach-Zehnder interferometer combined with the effective aperture, the measurement of the wavefront aberration of test microlens is simulated to show that the imaginary aperture by the software settled on the image sensor which is located at the conjugate position of the test microlens is equivalent to the hardware determined effective aperture including projected one. Numerical results are presented to show the measurement errors stay within λ/100 for two typical test microlens of 38 μmΦ and 125 μmΦ with 1 λ wavefront aberration for aberration-free measuring optics with large enough numerical aperture.

Paper Details

Date Published: 2 August 2004
PDF: 11 pages
Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); doi: 10.1117/12.559837
Show Author Affiliations
Masahiko Kato, Consultant (Japan)
Takaaki Miyashita, Ricoh Co., Ltd. (Japan)
Kenjiro Hamanaka, Nippon Sheet Glass Co., Ltd. (Japan)
Satoshi Ishihara, OITDA (Japan)
Eiichi Sato, Opto Design, Inc. (Japan)
Tadashi Morokuma, Tokai Univ. (Japan)


Published in SPIE Proceedings Vol. 5532:
Interferometry XII: Applications
Wolfgang Osten; Erik Novak, Editor(s)

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