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Proceedings Paper

Novel biomedical implant interconnects utilizing micromachined LCP
Author(s): Robert Neal Dean; Jenny Weller; Michael Bozack; Brian Farrell; Linas Jauniskis; Joseph Ting; David Edell; Jamille Hetke
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Paper Abstract

Micro- and nano-MEMS technology is being increasingly exploited in biomedical applications, such as large electrode-count neural prosthesis probe arrays. However, a bottleneck in fully utilizing this technology has been the interconnect between the implanted MEMS device and the external system connected to the implanted device. Since the implanted MEMS device is capable of having a large number of elements, the interconnect must have a sufficient number of electrical connections to communicate with each and every element. Complicating this is the fact that the interconnect requirements may include electrical signals, microfluidics transport and optical signals, all packaged in a miniature biocompatible interconnect cable. Micromachined liquid crystal polymer (LCP) is a promising technology for this application, due to LCP's biocompatibility, chemical inertness, electromechanical properties and its ability to be micromachined. This paper presents the results from the development of surface micromachining techniques compatible with LCP, and is demonstrated in the realization of a prototype micromachined LCP biomedical interconnect device. In particular, the development of the interconnect device demonstrates the realization of biocompatible connectors with high-density ultra-fine pitch electrical traces.

Paper Details

Date Published: 8 October 2004
PDF: 12 pages
Proc. SPIE 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices, (8 October 2004); doi: 10.1117/12.559831
Show Author Affiliations
Robert Neal Dean, Auburn Univ. (United States)
Jenny Weller, Auburn Univ. (United States)
Michael Bozack, Auburn Univ. (United States)
Brian Farrell, Foster-Miller, Inc. (United States)
Linas Jauniskis, Foster-Miller, Inc. (United States)
Joseph Ting, Foster-Miller, Inc. (United States)
David Edell, InnerSea Technology, Inc. (United States)
Jamille Hetke, Univ. of Michigan/Ann Arbor (United States)


Published in SPIE Proceedings Vol. 5515:
Nanoengineering: Fabrication, Properties, Optics, and Devices
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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