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Proceedings Paper

Environmentally friendly interferometry
Author(s): Leslie L. Deck
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Paper Abstract

Combining spatial and time-domain processing in wave-front measuring interferometers is a powerful tool for reducing the influence of environmental disturbances on the measurement. Modern digital imagers and computing platforms eliminate most of the disadvantages typically cited against spatial processing techniques. The ability to perform both spatial and time-domain processing in a single instrument provides the greatest flexibility for precision metrology applications in both static and dynamic environments.

Paper Details

Date Published: 2 August 2004
PDF: 11 pages
Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); doi: 10.1117/12.559722
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 5532:
Interferometry XII: Applications
Wolfgang Osten; Erik Novak, Editor(s)

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