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Proceedings Paper

Nanotomography using parabolic refractive x-ray lenses
Author(s): Christian G. Schroer; Boris M. Benner; Til Florian Gunzler; Marion Kuhlmann; Jens Patommel; Bruno Lengeler; Andrea Somogyi; Timm Weitkamp; Christoph Rau; Anatoly A. Snigirev; Irina I. Snigireva
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Paper Abstract

In recent years, hard x-ray full field microscopy and tomography has been developed for synchrotron radiation sources based on parabolic refractive x-ray lenses. These optics are used as objective lens in a hard x-ray microscope that can image objects in transmission free of distortion. Using beryllium as lens material, an optical resolution of about 100nm has been reached in a field of view that is larger than 500 micrometers. In the future, the spatial resolution may be improved to below 50nm. Recording a large number of micrographs from different perspectives allows one to reconstruct non-destructively the 3-dimensional inner structure of an object with resolutions well below one micrometer. Different contrast mechanisms can be exploited, such as absorption and near field phase contrast. The method is demonstrated using a microchip as a test sample.

Paper Details

Date Published: 26 October 2004
PDF: 8 pages
Proc. SPIE 5535, Developments in X-Ray Tomography IV, (26 October 2004); doi: 10.1117/12.559643
Show Author Affiliations
Christian G. Schroer, Aachen Univ. (Germany)
HASYLAB/Deutches Electronen-Synchrotron (Germany)
Boris M. Benner, Aachen Univ. (Germany)
Til Florian Gunzler, Aachen Univ. (Germany)
Marion Kuhlmann, Aachen Univ. (Germany)
Jens Patommel, Aachen Univ. (Germany)
Bruno Lengeler, Aachen Univ. (Germany)
Andrea Somogyi, European Synchrotron Radiation Facility (France)
Timm Weitkamp, Paul Scherrer Institut (Switzerland)
Christoph Rau, European Synchrotron Radiation Facility (France)
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Irina I. Snigireva, European Synchrotron Radiation Facility (France)

Published in SPIE Proceedings Vol. 5535:
Developments in X-Ray Tomography IV
Ulrich Bonse, Editor(s)

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