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Proceedings Paper

Investigations of large x-ray optics for free electron lasers
Author(s): Michael Stormer; Audrey Liard-Cloup; Frank Felten; Sandra Jacobi; Barbara Steeg; Josef Feldhaus; Rudiger Bormann
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Paper Abstract

A free electron laser (FEL) is being set up at DESY (Deutsches Elektronen Synchrotron, Hamburg, Germany). In the current XUV range of the FEL, total-reflection X-ray mirrors are needed for beam guidance, beam alignment, and monochromatisation. Such X-ray optics are used at a grazing incidence angle of about 2°; thus a maximum length of about 500 mm is required. Due to the working range of the FEL (50 - 200 eV), carbon has been selected as a suitable material with an absorption edge at 284 eV. The amorphous carbon coatings were manufactured by magnetron sputtering in a special UHV system for large deposition at GKSS research centre (Geesthacht, Germany). The variation in film thickness over the whole length has been investigated by X-ray reflectometry (XRR). Good uniformity (better than 2 %) and low roughness (< 0.5 nm) have been observed.

Paper Details

Date Published: 18 October 2004
PDF: 8 pages
Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); doi: 10.1117/12.559619
Show Author Affiliations
Michael Stormer, GKSS Forschungszentrum (Germany)
Audrey Liard-Cloup, Jobin Yvon SAS (France)
Frank Felten, Technische Univ. Hamburg-Harburg (Germany)
Sandra Jacobi, GKSS Forschungszentrum (Germany)
Barbara Steeg, HASYLAB/Deutsches Elektronen Synchrotron (Germany)
Josef Feldhaus, HASYLAB/Deutsches Elektronen Synchrotron (Germany)
Rudiger Bormann, GKSS Forschungszentrum (Germany)

Published in SPIE Proceedings Vol. 5533:
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
Ali M. Khounsary; Udo Dinger; Kazuya Ota, Editor(s)

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