Share Email Print
cover

Proceedings Paper

Azimuth calibration method in ellipsometer with imaging spectrograph
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The ellipsometry is known as high precision metrology for thin film thickness measurements and its optical properties by measuring ellipsometric parameters, ψ and Δ, defined as amplitude and phase values of the ratio of Fourier reflection coefficients for p- and s-polarized light. With conventional ellipsometers, we can get average values of ellipsometric parameters in the region of interest determined by spot size of measurement beam. However, we can expand the measurement scheme to two dimensional spectral imaging with additional imaging spectrograph compatible to the structure of ellipsometer. That is, we can simultaneously get spatial and spectroscopic ellipsometric parameters using two dimensional imaging detectors. Using this type of ellipsometers, polarization state dependent response of imaging spectrograph must be considered carefully during azimuth calibration procedures as well as ellipsometric parameters measurement. In this paper, we suggest Jones calculus model for ellipsometer with considering dichroic response in spectrograph and background signal levels in detector. And we show experimental calibration results comparison with that of simulation using suggested Jones calculus model.

Paper Details

Date Published: 15 October 2004
PDF: 6 pages
Proc. SPIE 5546, Imaging Spectrometry X, (15 October 2004); doi: 10.1117/12.559382
Show Author Affiliations
Won Chegal, Korea Research Institute of Standards and Science (South Korea)
Yong Jai Cho, Korea Research Institute of Standards and Science (South Korea)
Hyun Jong Kim, Korea Research Institute of Standards and Science (South Korea)
Hyun Mo Cho, Korea Research Institute of Standards and Science (South Korea)
Yun Woo Lee, Korea Research Institute of Standards and Science (South Korea)
Soo Hyun Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 5546:
Imaging Spectrometry X
Sylvia S. Shen; Paul E. Lewis, Editor(s)

© SPIE. Terms of Use
Back to Top