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Proceedings Paper

Design and fabrication of Si-based pickup module for optical storage
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Paper Abstract

We have proposed a miniaturized optical signal pickup module comprised of several SiNX membrane devices on stacked Si substrates for use in optical storage system. The optical module was designed to include not only light sources and detectors, but also the diffractive optical elements (DOEs), which can be made with microoptoelectromechanical systems (MOEMS) technology. Its optical operation was simulated by ray-tracing to have an optimized spot size (~0.6μm) focused on the disk with setting the tolerance of each element for the alignment. All these Si-based transmission optical elements were fabricated and can be stacked by self-alignment bonding for system assembly.

Paper Details

Date Published: 22 October 2004
PDF: 9 pages
Proc. SPIE 5524, Novel Optical Systems Design and Optimization VII, (22 October 2004); doi: 10.1117/12.559258
Show Author Affiliations
Chien Chieh Lee, National Central Univ. (Taiwan)
Chih Ming Wang, National Central Univ. (Taiwan)
Jenq Yang Chang, National Central Univ. (Taiwan)
Gou Chung Chi, National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 5524:
Novel Optical Systems Design and Optimization VII
Jose M. Sasian; R. John Koshel; Paul K. Manhart; Richard C. Juergens, Editor(s)

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