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Proceedings Paper

The study of fiber optic interferometer for the calibration of PZT travel distance
Author(s): Kai-Yu Cheng; Jung-Tsung Chou; Hung-Ming Tai; Huang-Chi Huang
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Paper Abstract

A fiber optic interferometer for a novel application is proposed in this paper. This new configuration and decoding scheme is in particular suitable for an AFM-tip tailoring system. A theoretical analysis method for simulating the relation of displacement and interfering intensity from the fiber optic sensor is thoroughly discussed. Experimental data for evaluating interfering efficiency agree well with simulation results. Higher resolution becomes achievable with the help of the two-channel interferometer decoding scheme. Moreover, the properties of the piezoelectric actuator used in this system are characterized by the optical sensor. This compact sensor exhibits satisfactory performance for the nanometer-resolution requirement of the developing AFM tip tailoring system.

Paper Details

Date Published: 2 August 2004
PDF: 9 pages
Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, (2 August 2004); doi: 10.1117/12.559235
Show Author Affiliations
Kai-Yu Cheng, Industrial Technology Research Institute (Taiwan)
Jung-Tsung Chou, Industrial Technology Research Institute (Taiwan)
Hung-Ming Tai, Industrial Technology Research Institute (Taiwan)
Huang-Chi Huang, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 5531:
Interferometry XII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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