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Proceedings Paper

Silicon-based guided-mode resonance nanophotonic device
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Paper Abstract

An out-of-plane guided-mode resonance (GMR) filter on a single Si chip using a two-layer polysilicon surface micromachining process was proposed. To the best of our knowledge, this is the first time that a monolithic optical filter has been integrated on a silicon microoptical bench. This device can be used as a bi-directional transceiver filter. The extinction ratio between 1550nm and 1310nm could be as low as 40dB and the channel passband at 1550nm was 20nm.

Paper Details

Date Published: 8 October 2004
PDF: 4 pages
Proc. SPIE 5515, Nanoengineering: Fabrication, Properties, Optics, and Devices, (8 October 2004); doi: 10.1117/12.559209
Show Author Affiliations
Chih Ming Wang, National Central Univ. (Taiwan)
Che Lung Xu, National Central Univ. (Taiwan)
Jenq Yang Chang, National Central Univ. (Taiwan)
Chien Chieh Lee, National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 5515:
Nanoengineering: Fabrication, Properties, Optics, and Devices
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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