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Proceedings Paper

Compact high-resolution homodyne interferometer for nanometer-scale multidimensional AFM metrology
Author(s): Satoshi Gonda; Kazuto Kinoshita; Hironori Noguchi; Hajime Koyanagi; Tsuneo Terasawa
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Paper Abstract

A design of a high-resolution homodyne interferometer is presented, modularized, and installed in a prototype, critical-dimension atomic force microscope (CD-AFM). A newly designed symmetrical layout of the optical path of the homodyne interferometers enabled highly stable measurements of the mechanical displacements of a wafer-positioning stage and an AFM scanner. In the performance measurement of the wafer-positioning stage, the mechanical drift after long-stroke travel and unlocking of the servo control was reduced to less than ten nanometers per minute by optimizing the preceding motion before stopping. An AFM scanner with a three-dimensional (3D) parallel spring structure has been implemented for the interferometer modules. Using a DSP-based electronic interpolation technique, displacement of the scanner was resolved and calibrated at better than 50 pm and 200 pm, respectively.

Paper Details

Date Published: 2 August 2004
PDF: 8 pages
Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); doi: 10.1117/12.559173
Show Author Affiliations
Satoshi Gonda, Advanced Semiconductor Research Ctr., AIST (Japan)
Kazuto Kinoshita, Advanced Semiconductor Research Ctr., AIST (Japan)
Hironori Noguchi, Advanced Semiconductor Research Ctr., AIST (Japan)
Hajime Koyanagi, Association of Super-Advanced Electronics Technologies, AIST (Japan)
Tsuneo Terasawa, Association of Super-Advanced Electronics Technologies, AIST (Japan)

Published in SPIE Proceedings Vol. 5532:
Interferometry XII: Applications
Wolfgang Osten; Erik Novak, Editor(s)

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