Share Email Print
cover

Proceedings Paper

New multilayer coating for 30.4-nm radiation
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A multilayer coating of Mo/Si is usually used as an EUV optics for space science, especially for He-II (30.4nm) radiation, because it is highly stable under vacuum and atmosphere. The fairly high reflectivity of 15-20% was achieved. But space science community will need higher reflective coating at 30.4 nm radiation for the future satellite missions. In this work, for developing new multilayer mirror of He-II radiations, we report the design of a multilayer, consisting of a pair of Mg and SiC, and its fabrication, and result of the reflectance with the monthly degradation under the atmosphere circumstance.

Paper Details

Date Published: 18 October 2004
PDF: 8 pages
Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); doi: 10.1117/12.558976
Show Author Affiliations
Ichiro Yoshikawa, Institute of Space and Astronautical Science (Japan)
Tetsunori Murachi, Institute of Space and Astronautical Science (Japan)


Published in SPIE Proceedings Vol. 5533:
Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II
Ali M. Khounsary; Udo Dinger; Kazuya Ota, Editor(s)

© SPIE. Terms of Use
Back to Top