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Proceedings Paper

Electron-beam-induced deposition of iron carbon nanostructures from iron dodecacarbonyl vapor
Author(s): M. A. Bruk; E. N. Zhikharev; E. I. Grigoriev; A. V. Spirin; V. A. Kalnov; I. E. Kardash
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Paper Abstract

Iron based nanocomposites are of great interest in particular because of their magnetic properties. Preliminary results on image deposition from iron dodecacarbonyl by focused electron beam are presented. The specific electric resistance of fabricated lines was measured in the range from 4•10-2to 103 Ω cm dependently on deposition conditions. It was observed, that if the beam current increases, specific resistance sharply decreases. Positive temperature coefficient of conductivity for such material was determined. Effective activation energy of conductivity changed from 3-5kJ/mol for high conductivity lines to 15-25kJ/mol for low conductivity lines. Obtained data are considered on the base of representations of produced lines material as nanoclusters of iron spread in amorphous carbon matrix. The resistance change of deposited lines in media of different vapours and gases was estimated.

Paper Details

Date Published: 28 May 2004
PDF: 6 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.558349
Show Author Affiliations
M. A. Bruk, Karpov Institute of Physical Chemistry (Russia)
E. N. Zhikharev, Institute of Physics and Technology (Russia)
E. I. Grigoriev, Karpov Institute of Physical Chemistry (Russia)
A. V. Spirin, Karpov Institute of Physical Chemistry (Russia)
V. A. Kalnov, Institute of Physics and Technology (Russia)
I. E. Kardash, Karpov Institute of Physical Chemistry (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003

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