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Proceedings Paper

Effect of electrostatic interaction between conductive cantilever and metal film on local anododic oxidation
Author(s): A. N. Bulatov; V. K. Nevolin
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Paper Abstract

As is shown, threshold voltage on the Au film that is necessary for electric contact depends on starting pressing force of the probe and interstatic interaction. Natural oxide on the Al surface can be a reason for amplification of threshold voltage. Under the action of pressing force oxide paths expand and oxide can be punctured.

Paper Details

Date Published: 28 May 2004
PDF: 7 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.558342
Show Author Affiliations
A. N. Bulatov, Moscow Univ. of Electronic Engineering (Russia)
V. K. Nevolin, Moscow Univ. of Electronic Engineering (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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