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Proceedings Paper

Multilevel kinoform microlens arrays in fused silica for high-power laser optics
Author(s): Victor V. Atuchin; I. S. Soldatenkov; A. V. Kirpichnikov; E. V. Mikhailov; Efim V. Pestryakov; Dmitriy V. Sheglov
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Paper Abstract

Diffraction microlens arrays has been fabricated in silica substrates by deep UV photolithography and wet chemical etching. The calculated kinoform profile has been approximated by multistep function and this microrelief has been transfered into the surface with wet etching through the photoresist mask. The diffraction efficiency of eight-level kinoform microlens is as high as 85%.

Paper Details

Date Published: 15 March 2004
PDF: 4 pages
Proc. SPIE 5481, Laser Optics 2003: Wavefront Transformation and Laser Beam Control, (15 March 2004); doi: 10.1117/12.558295
Show Author Affiliations
Victor V. Atuchin, Institute of Semiconductor Physics (Russia)
I. S. Soldatenkov, Institute of Semiconductor Physics (Russia)
A. V. Kirpichnikov, Institute of Laser Physics (Russia)
E. V. Mikhailov, Institute of Continuous Media Mechanics (Russia)
Efim V. Pestryakov, Institute of Laser Physics (Russia)
Dmitriy V. Sheglov, Institute of Semiconductor Physics (Russia)


Published in SPIE Proceedings Vol. 5481:
Laser Optics 2003: Wavefront Transformation and Laser Beam Control
Vladimir E. Sherstobitov; Leonid N. Soms, Editor(s)

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