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Proceedings Paper

Recent advances in the development of coherent and incoherent UV and EUV discharge sources
Author(s): Vladimir M. Borisov; Andrei I. Demin; A. Eltzov; Alexander S. Ivanov; Oleg B. Khristoforov; Yuriy B. Kirykhin; Aleksandr Yu. Vinokhodov; V. A. Vodchits; Valentin A. Mischenko; Alexander V. Prokofiev
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Paper Abstract

We report on the experimental status of the development of compact high power (up to 500 W) high repetition rate (up to 6 kHz) excimer lasers and discharge produced plasma sources radiating in an extreme ultraviolet (EUV) region. EUV power more than 70 W (around 13.5 nm wavelength, a bandwidth of 2%) into 2π sr at 1250 Hz was obtained for continuous operation of a source.

Paper Details

Date Published: 16 June 2004
PDF: 10 pages
Proc. SPIE 5479, Laser Optics 2003: High-Power Gas Lasers, (16 June 2004); doi: 10.1117/12.558204
Show Author Affiliations
Vladimir M. Borisov, Troitsk Institute for Innovation and Fusion Research (Russia)
Andrei I. Demin, Troitsk Institute for Innovation and Fusion Research (Russia)
A. Eltzov, Troitsk Institute for Innovation and Fusion Research (Russia)
Alexander S. Ivanov, Troitsk Institute for Innovation and Fusion Research (Russia)
Oleg B. Khristoforov, Troitsk Institute for Innovation and Fusion Research (Russia)
Yuriy B. Kirykhin, Troitsk Institute for Innovation and Fusion Research (Russia)
Aleksandr Yu. Vinokhodov, Troitsk Institute for Innovation and Fusion Research (Russia)
V. A. Vodchits, Troitsk Institute for Innovation and Fusion Research (Russia)
Valentin A. Mischenko, Troitsk Institute for Innovation and Fusion Research (Russia)
Alexander V. Prokofiev, Troitsk Institute for Innovation and Fusion Research (Russia)


Published in SPIE Proceedings Vol. 5479:
Laser Optics 2003: High-Power Gas Lasers
Oleg B. Danilov, Editor(s)

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