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Proceedings Paper

An electrically tunable infrared filter on base of Fabry-Perot interferometer
Author(s): Steffen Kurth; Karla Hiller; Norbert Neumann; Matthias Heinze; Wolfram Doetzel; Thomas Gessner
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Paper Abstract

This contribution deals with design, fabrication and test of a micromachined Fabry-Perot-Interferometer in first order configuration. Main application fields are chemical analysis, infrared sensing and spectral imaging. Some of the most important properties of a FPI filter are the full width half maximum (FWHM) and the tunable spectral range which are generally limited by the curvature and tilt of the mirrors and by their reflectance.

Paper Details

Date Published: 7 April 2004
PDF: 6 pages
Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); doi: 10.1117/12.558124
Show Author Affiliations
Steffen Kurth, Fraunhofer-Institut fuer Zuverlassigkeit und Mikrointegration (Germany)
Karla Hiller, Technische Univ. Chemnitz (Germany)
Norbert Neumann, InfraTec GmbH (Germany)
Matthias Heinze, InfraTec GmbH (Germany)
Wolfram Doetzel, Technische Univ. Chemnitz (Germany)
Thomas Gessner, Fraunhofer-Institut fuer Zuverlassigkeit und Mikrointegration (Germany)
Technische Univ. Chemnitz (Germany)

Published in SPIE Proceedings Vol. 5445:
Microwave and Optical Technology 2003
Jaromir Pistora; Kamil Postava; Miroslav Hrabovsky; Banmali S. Rawat, Editor(s)

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