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Proceedings Paper

Design and fabrication of the diffractive x-ray optics at BESSY
Author(s): Alexandre Firsov; Alexei I. Erko; Alexander Svintsov
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Paper Abstract

The concept of the design and fabrication of X-ray diffraction focusing elements is discussed. This concept includes both reflection and transmission types of optics as well as equipment necessary for their fabrication.

Paper Details

Date Published: 4 November 2004
PDF: 5 pages
Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); doi: 10.1117/12.557865
Show Author Affiliations
Alexandre Firsov, BESSY GmbH (Germany)
Alexei I. Erko, BESSY GmbH (Germany)
Alexander Svintsov, Institute of Microelectronics Technology (Russia)


Published in SPIE Proceedings Vol. 5539:
Design and Microfabrication of Novel X-Ray Optics II
Anatoly A. Snigirev; Derrick C. Mancini, Editor(s)

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