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Proceedings Paper

LEEPL data conversion system
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Paper Abstract

PATACON-LEEPL is a software product for converting semiconductor mask CAD data to the EB data of masks for LEEPL transcribing devices. This software has several functions, such as pattern placement function corresponding to the structure of the LEEPL mask, which is different from the mask for optical steppers, complementary division function for stencil masks, correction of distortion due to mask internal stress, and alignment mark insertion. This software operates in the environment in which several to some hundreds of Linux PC's are connected by a high-speed network.

Paper Details

Date Published: 20 August 2004
PDF: 9 pages
Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); doi: 10.1117/12.557778
Show Author Affiliations
Masahiro Shoji, Nippon Control System Corp. (Japan)
Nobuyasu Horiuchi, Nippon Control System Corp. (Japan)

Published in SPIE Proceedings Vol. 5446:
Photomask and Next-Generation Lithography Mask Technology XI
Hiroyoshi Tanabe, Editor(s)

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