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Proceedings Paper

Statistical properties analysis of dynamic speckles produced by a weak random phase screen under illumination of a Gaussian light
Author(s): Lili Zhou; Xuezeng Zhao; Weijie Wang
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Paper Abstract

Dynamic speckles appear when a diffuse object moving in a plane is illuminated by a Gaussian light beam. The statistical properties of dynamic speckles produced in the Fresnel diffraction field by a diffuse object moving along x-axis with constant velocity are investigated in this paper. The space-time correlation function of the dynamic speckle intensity fluctuation is discussed in detail by using a weak random phase screen as a model of the diffuse object. The parameters describing the properties of the space-time cross-correlation of dynamic speckles, such as average grain size, translation distance and correlation distance, are given under some special conditions. It is shown that the statistical properties of dynamic speckles depend on the optical condition, surface roughness, and moving velocity of the object. The relation of translation and boiling motions of the dynamic speckles and the optical condition and surface roughness is discussed. The possibility is presented for measuring the roughness of the object using the correlation function of dynamic speckles.

Paper Details

Date Published: 20 August 2004
PDF: 8 pages
Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); doi: 10.1117/12.557768
Show Author Affiliations
Lili Zhou, Harbin Institute of Technology (China)
Xuezeng Zhao, Harbin Institute of Technology (China)
Weijie Wang, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 5446:
Photomask and Next-Generation Lithography Mask Technology XI
Hiroyoshi Tanabe, Editor(s)

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