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Proceedings Paper

Characteristics of diffractive optical element for multispot beam homogenizing
Author(s): Takayuki Hirai; Keiji Fuse; Kenichi Kurisu; Keiji Ebata
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Paper Abstract

Laser materials processing has been used increasingly over the wide area of electronic industries, especially for drilling microvias in printed circuit boards, and poly-silicon annealing for thin film transistor of liquid crystal display. To increase a processing speed, it has been developed a beam splitting element of a diffractive optical element (DOE). And the other hand, to obtain higher uniformity, because the intensity distribution of laser beam is usually a non-uniform gaussian profile, beam homogenizer of a DOE has recently been developed and introduced to some promising applications. Through the improvement of optical design algorithms, micro-fabrication techniques of a phase pattern of DOE and new method of optical system, it enables to combine its beam splitting function and homogenizing function. It can produce the simultaneous multi-spot homogenized beam. In this investigation, we introduce a concrete design and fabrication result of multi-spot beam homogenizing system for SHG-YAG laser that can convert a gaussian distribution into the plural number of uniformity intensity distribution, and present the possibility of new laser material processing by using such optics.

Paper Details

Date Published: 29 September 2004
PDF: 8 pages
Proc. SPIE 5525, Laser Beam Shaping V, (29 September 2004); doi: 10.1117/12.557490
Show Author Affiliations
Takayuki Hirai, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Fuse, Sumitomo Electric Industries, Ltd. (Japan)
Kenichi Kurisu, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Ebata, Sumitomo Electric Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 5525:
Laser Beam Shaping V
Fred M. Dickey; David L. Shealy, Editor(s)

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