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Proceedings Paper

Optical-mechanical method for measurements in microtechnologies
Author(s): Tamara V. Tulaikova; Svetlana Amirova; Hannes Bleuler; Philippe Renaud
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Paper Abstract

A convenient method for exact recognitions of the curved shape and amplitudes of vibrated micro cantilevers is presented. The method includes the analysis based on preliminary introduction of the formulas for the shapes of deviated cantilevers to get the intensity distribution R(ξ) of the optical pattern of image. The feature of this method is the possibility to get high accuracy for MEMS orientation.

Paper Details

Date Published: 12 October 2004
PDF: 10 pages
Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); doi: 10.1117/12.557465
Show Author Affiliations
Tamara V. Tulaikova, Institute for Problems in Mechanics (Russia)
Svetlana Amirova, Moscow Institute of Physics and Technology (Russia)
Hannes Bleuler, Swiss Federal Institute of Technology (Switzerland)
Philippe Renaud, Swiss Federal Institute of Technology (Switzerland)


Published in SPIE Proceedings Vol. 5553:
Advanced Wavefront Control: Methods, Devices, and Applications II
John D. Gonglewski; Mark T. Gruneisen; Michael K. Giles, Editor(s)

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