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Proceedings Paper

The polyimides photoresist for multilevel-interconnect VLSI technology
Author(s): Nikolay G. Savinskii
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Paper Details

Date Published: 28 May 2004
PDF: 11 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.557330
Show Author Affiliations
Nikolay G. Savinskii, Institute of Microelectronics and Informatics (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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