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Proceedings Paper

PMMA and polystyrene films modification under ion implantation studied by spectroscopic ellipsometry
Author(s): A. V. Leontyev; V. I. Kovalev; A. V. Khomich; Fadei F. Komarov; V. V. Grigoryev; A. S. Kamishan
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Paper Abstract

We have applied spectroscopic ellipsometry with binary polarization modulation to study the refractive index n(λ) and extinction coefficient k(λ) spectra of as-deposited and irradiated with nitrogen ions polymethylmethacrylate (PMMA) and polystyrene (PS) films in 300-1030 nm range. The results of performed investigation confirmed the possibility and estimate restrictions of the ion implantation for local change the refractive index of polymeric materials.

Paper Details

Date Published: 28 May 2004
PDF: 7 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.557303
Show Author Affiliations
A. V. Leontyev, Belorussian State Univ. (Belarus)
V. I. Kovalev, Institute of Radio Engineering and Electronics (Russia)
A. V. Khomich, Institute of Radio Engineering and Electronics (Russia)
Fadei F. Komarov, Belorussian State Univ. (Belarus)
V. V. Grigoryev, Belorussian State Univ. (Belarus)
A. S. Kamishan, Belorussian State Univ. (Belarus)

Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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