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Proceedings Paper

Tomographic reconstruction of space plasma inhomogeneities in wide-aperture plasma sources under strong restriction on the points of view
Author(s): Konstantin V. Rudenko; A. V. Fadeev; Alexander A. Orlikovsky; K. A. Valiev
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Paper Abstract

Lateral distribution of particles density in the plasma across the wafer surface is critical for plasma processing steps in IC manufacturing and should be optimized at the stage of process design. Optical emission tomography of the plasma is promising technique for this goal. Presented investigation is carried out to develop the algorithms of tomographic reconstruction of 2D-distribution plasma species density from its characteristic optical emission data. The geometry of the tomographic data acquisition was chosen to be compatible with the commercial types of plasma reactors. Advanced accuracy of reconstruction has been achieved by including the classes of the space profiles of inhomogeneities based on the discharge physics into reconstruction algorithm. The tests have been performed with the kinds of inhomogeneities, which is most probable in plasma reactors with HDP sources.

Paper Details

Date Published: 28 May 2004
PDF: 7 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.557252
Show Author Affiliations
Konstantin V. Rudenko, Institute of Physics and Technology (Russia)
A. V. Fadeev, Institute of Physics and Technology (Russia)
Alexander A. Orlikovsky, Institute of Physics and Technology (Russia)
K. A. Valiev, Institute of Physics and Technology (Russia)

Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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