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Proceedings Paper

Near-field solid immersion lens (SIL) microscope with advanced compact mechanical design
Author(s): Tao Chen; David Felix; Sang-Ki Park; Paul Hauser; Brendan P. McCarthy; Dror Sarid; Christian D. Poweleit; Jose Menendez; Tom D. Milster
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Paper Abstract

We developed a compact mechanical mount package for Solid Immersion Lens (SIL). At 600 nm wavelength illumination, the resolution of this system is 200 nm with an effective NA of 1.5.

Paper Details

Date Published: 9 September 2004
PDF: 8 pages
Proc. SPIE 5380, Optical Data Storage 2004, (9 September 2004); doi: 10.1117/12.557055
Show Author Affiliations
Tao Chen, Optical Sciences Ctr./Univ. of Arizona (United States)
David Felix, Optical Sciences Ctr./Univ. of Arizona (United States)
Sang-Ki Park, Optical Sciences Ctr./Univ. of Arizona (United States)
Paul Hauser, Optical Sciences Ctr./Univ. of Arizona (United States)
Brendan P. McCarthy, Optical Sciences Ctr./Univ. of Arizona (United States)
Dror Sarid, Optical Sciences Ctr./Univ. of Arizona (United States)
Christian D. Poweleit, Arizona State Univ. (United States)
Jose Menendez, Arizona State Univ. (United States)
Tom D. Milster, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 5380:
Optical Data Storage 2004
B. V. K. Vijaya Kumar; Hiromichi Kobori, Editor(s)

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