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Proceedings Paper

Microwave discharge on external surface of quartz plate
Author(s): Valery M. Shibkov; Vladimir A. Chernikov; Sergey A. Dvinin; Alexey P. Ershov; Andrey A. Karachev; Lidia V. Shibkova; Oleg S. Surkont; Anatoliy V. Voskanyan
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Paper Abstract

A new way of creation of the stable and constantly reproduced at various experiments surface microwave discharge near a flat dielectric antenna was developed and experimentally investigated at a wide range of air pressure p=10-3 ÷103 torr. The breakdown characteristics determining a threshold of a surface microwave discharge appearance were studied. Longitudinal size and velocity of spreading of a surface microwave discharge in air were determined at a wide range of gas pressure, microwave power and pulse duration. The spatial-temporary evolution of electron density, gas and vibrational temperatures were investigated. It is shown that the surface microwave discharge can be used as a plasma source for microelectronics and material processing.

Paper Details

Date Published: 28 May 2004
PDF: 8 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.556992
Show Author Affiliations
Valery M. Shibkov, M.V. Lomonosov Moscow State Univ. (Russia)
Vladimir A. Chernikov, M.V. Lomonosov Moscow State Univ. (Russia)
Sergey A. Dvinin, M.V. Lomonosov Moscow State Univ. (Russia)
Alexey P. Ershov, M.V. Lomonosov Moscow State Univ. (Russia)
Andrey A. Karachev, M.V. Lomonosov Moscow State Univ. (Russia)
Lidia V. Shibkova, M.V. Lomonosov Moscow State Univ. (Russia)
Oleg S. Surkont, M.V. Lomonosov Moscow State Univ. (Russia)
Anatoliy V. Voskanyan, M.V. Lomonosov Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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