Share Email Print
cover

Proceedings Paper

Automatical optimization of pupil filters for high-resolution photolithography
Author(s): M. Machin; M. Gitlin; Nikolay G. Savinskii
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A pupil filter optimization algorithm is presented. The algorithm was tested for low-aperture stepper. The experimental data for resolution and depth of focus enhancement are described.

Paper Details

Date Published: 28 May 2004
PDF: 6 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.556989
Show Author Affiliations
M. Machin, Institute of Microelectronics and Informatics (Russia)
M. Gitlin, Institute of Microelectronics and Informatics (Russia)
Nikolay G. Savinskii, Institute of Microelectronics and Informatics (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

© SPIE. Terms of Use
Back to Top