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Proceedings Paper

EUV radiation from plasma of a pseudospark discharge in its different stages
Author(s): Yuri D. Korolev; O. B. Frants; V. G. Geyman; R. V. Ivashov; N. V. Landl; I. A. Shemyakin
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Paper Abstract

The paper describes the main features of the pulsed low-pressure gas discharge in oxygen and xenon, which burns in typical conditions of EUV source operation. It is shown that in a mode of the superdense glow discharge the electron temperature in the discharge plasma is high enough to provide for generation of EUV radiation without magnetic compression of the plasma column.

Paper Details

Date Published: 28 May 2004
PDF: 6 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.556972
Show Author Affiliations
Yuri D. Korolev, Institute of High Current Electronics (Russia)
O. B. Frants, Institute of High Current Electronics (Russia)
V. G. Geyman, Institute of High Current Electronics (Russia)
R. V. Ivashov, Institute of High Current Electronics (Russia)
N. V. Landl, Institute of High Current Electronics (Russia)
I. A. Shemyakin, Institute of High Current Electronics (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003
Kamil A. Valiev; Alexander A. Orlikovsky, Editor(s)

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