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Proceedings Paper

Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region
Author(s): M. S. Bibishkin; D. P. Chekhonadskih; N. I. Chkhalo; E. B. Kluyenkov; A. E. Pestov; Nikolai N. Salashchenko; L. A. Shmaenok; I. G. Zabrodin; S. Yu. Zuev
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Paper Abstract

In the paper, we report development of two reflectometers in IPM RAS. One enables investigation of the angular and spectral characteristics of mirrors with any shape of a reflecting surface in the 0.6-20 nm spectral range. The other, designed especially to study the influence of EUV sources on the reflecting characteristics of the mirrors, allows testing of flat samples. Owing to a high aperture ratio (solid angle of 0.034 steradian), high reflection coefficient of mirrors, powerful windowless X-ray tube, and effective detector, the reflectometer provides a resolution of the reflection coefficient variation at a level of 0.1%.

Paper Details

Date Published: 28 May 2004
PDF: 8 pages
Proc. SPIE 5401, Micro- and Nanoelectronics 2003, (28 May 2004); doi: 10.1117/12.556949
Show Author Affiliations
M. S. Bibishkin, Institute for Physics of Microstructures (Russia)
D. P. Chekhonadskih, Institute for Physics of Microstructures (Russia)
N. I. Chkhalo, Institute for Physics of Microstructures (Russia)
E. B. Kluyenkov, Institute for Physics of Microstructures (Russia)
A. E. Pestov, Institute for Physics of Microstructures (Russia)
Nikolai N. Salashchenko, Institute for Physics of Microstructures (Russia)
L. A. Shmaenok, A.F. Ioffe Physico-Technical Institute (Russia)
I. G. Zabrodin, Institute for Physics of Microstructures (Russia)
S. Yu. Zuev, Institute for Physics of Microstructures (Russia)


Published in SPIE Proceedings Vol. 5401:
Micro- and Nanoelectronics 2003

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