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Proceedings Paper

Measurement of the optical constants of Sc films in the extreme ultraviolet
Author(s): Jose Antonio Aznarez; Juan Ignacio Larruquert; Jose Antonio Mendez; Sara Covini; Andrea Marco Malvezzi; Luca Poletto
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Paper Abstract

The optical properties of thin Sc films deposited in ultra high vacuum conditions have been investigated in the 6.7-174.4 nm spectral range. Transmittance and multi-angle reflectance were measured in situ in the 53.6-174.4 nm spectral range and they were used to obtain the complex refractive index of Sc films at every individual wavelength investigated. Transmittance measurements were made on Sc samples that were deposited over grids coated with a support C film. The transmittance and the extinction coefficient of Sc films at wavelengths shorter than 30 nm were measured ex situ. The ex situ samples were protected with an additional top C film before removal from vacuum. The transmittance characteristics of Sc films make them a potential candidate for EUV filters.

Paper Details

Date Published: 14 October 2004
PDF: 11 pages
Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); doi: 10.1117/12.556794
Show Author Affiliations
Jose Antonio Aznarez, Instituto de Fisica Aplicada (Spain)
Juan Ignacio Larruquert, Instituto de Fisica Aplicada (Spain)
Jose Antonio Mendez, Instituto de Fisica Aplicada (Spain)
Sara Covini, INFM, Univ. degli Studi di Pavia (Italy)
Andrea Marco Malvezzi, INFM, Univ. degli Studi di Pavia (Italy)
Luca Poletto, INFM, Univ. degli Studi di Pavia (Italy)

Published in SPIE Proceedings Vol. 5538:
Optical Constants of Materials for UV to X-Ray Wavelengths
Regina Soufli; John F. Seely, Editor(s)

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