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Proceedings Paper

Methods to recognize the sample position for most precise interferometric length measurements
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Paper Abstract

In interferometric length measurements the position of the sample with respect to the interference phase map is very important. Even the pixel resolution of the camera array may limit the measurement uncertainty, depending on the amount of the sample’s non-parallelism. In this case a correction can be applied taking into account a sub-pixel position at the sample’s front measuring face. In this paper three different methods are introduced which can be used for the definition of a sub-pixel central coordinate. Measurement examples illustrate that a value of 0.04 pixels for the standard uncertainty associated with the sub-pixel position seems realistic.

Paper Details

Date Published: 2 August 2004
PDF: 11 pages
Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); doi: 10.1117/12.555835
Show Author Affiliations
Rene Schoedel, Physikalisch-Technische Bundesanstalt (Germany)
Jennifer E. Decker, INMS--National Research Council (Canada)

Published in SPIE Proceedings Vol. 5532:
Interferometry XII: Applications
Wolfgang Osten; Erik Novak, Editor(s)

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