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Proceedings Paper

Quantifying stresses induced by laser micromachining using micro-Raman spectroscopy
Author(s): Larry R. Dosser; Maher S. Amer; Mostafa El-Ashry; Kenneth E. Hix; Bryan S. Irwin
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Proc. SPIE GL10, Nano and Micro Technology and Applications, ; doi: 10.1117/12.555623
Show Author Affiliations
Larry R. Dosser, Mound Laser & Photonics Ctr., Inc. (United States)
Maher S. Amer, Wright State Univ. (United States)
Mostafa El-Ashry, Wright State Univ. (United States)
Kenneth E. Hix, Mound Laser & Photonics Ctr., Inc. (United States)
Bryan S. Irwin, Sciperio, Inc. (United States)


Published in SPIE Proceedings Vol. GL10:
Nano and Micro Technology and Applications
James G. Grote; Andrew M. Sarangan; Larry R. Dosser; Stanley Rogers, Editor(s)

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