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Proceedings Paper

Microelectromechanical (MEMS) varactors for mobile communications
Author(s): Maxim V. Shakhrai
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Paper Abstract

Short overview of various microelectromechanical (MEMS) varactor types potentially suitable for mobile communications of the new generation is given. Special attention is given to MEMS varactors with electrostatic drive which are mostly widespread. Important varactor characteristics are compared for different varactor types.

Paper Details

Date Published: 5 April 2004
PDF: 4 pages
Proc. SPIE 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 April 2004); doi: 10.1117/12.555375
Show Author Affiliations
Maxim V. Shakhrai, St. Petersburg State Polytechnical Univ. (Russia)
Fraunhofer-Institut fuer Siliziumtechnologie (Germany)


Published in SPIE Proceedings Vol. 5400:
Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Alexander I. Melker, Editor(s)

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