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Proceedings Paper

Electron-based microfocus soft-x-ray source and applications
Author(s): Andre Egbert; Boris Tkachenko; Stefan Becker; Boris N. Chichkov
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Paper Abstract

A compact electron-based microfocus EUV/soft-x-ray source for applications in metrology and microscopy is developed. The source concept is based on the transfer of advanced microfocus x-ray tube technology into the EUV/soft-x-ray spectral range. This allows the realization of a flexible, debris-free, and long-term stable source. Detailed characteristics of the source performance are reported and different applications of the soft-x-ray tube in the field of at-wavelength metrology are presented.

Paper Details

Date Published: 3 November 2004
PDF: 11 pages
Proc. SPIE 5537, X-Ray Sources and Optics, (3 November 2004); doi: 10.1117/12.554894
Show Author Affiliations
Andre Egbert, phoenix|euv Systems + Services GmbH (Germany)
Boris Tkachenko, phoenix|euv Systems + Services GmbH (Germany)
Stefan Becker, phoenix|euv Systems + Services GmbH (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)


Published in SPIE Proceedings Vol. 5537:
X-Ray Sources and Optics
Carolyn A. MacDonald; Albert T. Macrander; Tetsuya Ishikawa; Christian Morawe; James L. Wood, Editor(s)

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