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Modified linear and circular carrier-frequency Fourier-transform method applied for studies of vibrating microelements
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Paper Abstract

Stroboscopic interferometry is the most popular method for investigation of active, vibrating elements. The interferograms obtained in measurement steps may be analysed by temporal phase shifting method or by spatial carrier frequency methods. The first one requires sequential capturing of phase-shifted interferograms which complicates the measurement system and introduces high stability requirements for the setup. The spatial methods need a single interferogram with a proper spatial carrier frequency (SCF), so they are more suitable for dynamic events analysis. The most frequently used spatial method is based on Fourier transform of an interferogram with linear SCF and can be applied to analysis of restricted class of elements represented by quasi-linear fringes. This can be easily expanded by considering elements with circular carrier fringes (CCF). In the paper two approaches to analysis of interferograms with CCF, namely: coordinate transform Fourier transform technique and direct filtering Fourier transform technique are explained. The error analysis of both techniques applied for different classes of interferograms is presented. The methodology of CCF interferogram analysis based on FT methods applied for micromembranes is presented and several exemplary results are given.

Paper Details

Date Published: 17 August 2004
PDF: 12 pages
Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); doi: 10.1117/12.554287
Show Author Affiliations
Jacek Kacperski, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)
Jerzy Krezel, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 5458:
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki; Anand K. Asundi, Editor(s)

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