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Proceedings Paper

New optical control system for precision and fine laser drilling device
Author(s): Takeji Arai; Toshiaki Yamaguchi
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Paper Abstract

A position difference from a theoretical one by ray tracing on the imaging plane has taken place due to a distortion by using f θ lens in this optical system, which has been able to be compensated by returning a correction value acquired from accurate theoretical calculations to the control system. This paper will describe the system and control of this equipment.

Paper Details

Date Published: 1 September 2004
PDF: 11 pages
Proc. SPIE 5456, Photon Management, (1 September 2004); doi: 10.1117/12.554278
Show Author Affiliations
Takeji Arai, Chuo Univ. (Japan)
Toshiaki Yamaguchi, NSK Ltd. (Japan)

Published in SPIE Proceedings Vol. 5456:
Photon Management
Frank Wyrowski, Editor(s)

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