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Proceedings Paper

Single layer poly-SiGe microemitter arrays for 8-12 micrometer spectral range
Author(s): Vladimir K. Malyutenko; Oleg Yu. Malyutenko; Vladimir Nikolaevic Leonov; Chris A. van Hoof; Robert P. Mertens
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Date Published:
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Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, ; doi: 10.1117/12.554265
Show Author Affiliations
Vladimir K. Malyutenko, Institute of Semiconductor Physics (Ukraine)
Oleg Yu. Malyutenko, Institute of Semiconductor Physics (Ukraine)
Vladimir Nikolaevic Leonov, IMEC (Belgium)
Chris A. van Hoof, IMEC (Belgium)
Robert P. Mertens, IMEC (Belgium)


Published in SPIE Proceedings Vol. 5455:
MEMS, MOEMS, and Micromachining
Hakan Urey; Ayman El-Fatatry, Editor(s)

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