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Proceedings Paper

Nanofabrication of solid materials with ultraviolet femtosecond pulses
Author(s): Jan-Hendrik Klein-Wiele; Jozsef Bekesi; Juergen Ihlemann; Peter Simon
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Paper Abstract

Surface treatment of metals and other materials is studied using sub-picosecond laser pulses at 248 nm. The advantage of the combination of femtosecond pulse durations with ultraviolet wavelengths is pointed out. Full utilization of the specific pulse parameters for nano-scale material processing is demonstrated. Imaging techniques combined with diffractive optical elements are exploited for the generation of two dimensional periodic structures. Superior quality and feature sizes below 100 nm are achieved. The ultra-short pulse UV laser system applied for surface texturing comprises a Ti:Sapphire front-end system and a specially developed excimer amplifier module generating 300 fs pulses at 248 nm with an average power of ~10 W. The excimer module operating at 300 Hz together with a newly introduced beam smoothing technique allows high precision texturing of large surfaces opening up new possibilities in industrial applications.

Paper Details

Date Published: 2 April 2004
PDF: 8 pages
Proc. SPIE 5399, Laser-Assisted Micro- and Nanotechnologies 2003, (2 April 2004); doi: 10.1117/12.552805
Show Author Affiliations
Jan-Hendrik Klein-Wiele, Laser-Lab. Goettingen e.V. (Germany)
Jozsef Bekesi, Laser-Lab. Goettingen e.V. (Germany)
Juergen Ihlemann, Laser-Lab. Goettingen e.V. (Germany)
Peter Simon, Laser-Lab. Goettingen e.V. (Germany)


Published in SPIE Proceedings Vol. 5399:
Laser-Assisted Micro- and Nanotechnologies 2003
Vadim P. Veiko, Editor(s)

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